JPH0212327B2 - - Google Patents
Info
- Publication number
- JPH0212327B2 JPH0212327B2 JP19589583A JP19589583A JPH0212327B2 JP H0212327 B2 JPH0212327 B2 JP H0212327B2 JP 19589583 A JP19589583 A JP 19589583A JP 19589583 A JP19589583 A JP 19589583A JP H0212327 B2 JPH0212327 B2 JP H0212327B2
- Authority
- JP
- Japan
- Prior art keywords
- combustion
- exhaust gas
- gas
- pipe
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002485 combustion reaction Methods 0.000 claims description 54
- 238000002347 injection Methods 0.000 claims description 16
- 239000007924 injection Substances 0.000 claims description 16
- 239000007789 gas Substances 0.000 description 82
- 229910000077 silane Inorganic materials 0.000 description 38
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 35
- 239000011261 inert gas Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 1
- 238000003113 dilution method Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19589583A JPS6089618A (ja) | 1983-10-19 | 1983-10-19 | 排ガス燃焼装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19589583A JPS6089618A (ja) | 1983-10-19 | 1983-10-19 | 排ガス燃焼装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6089618A JPS6089618A (ja) | 1985-05-20 |
JPH0212327B2 true JPH0212327B2 (en]) | 1990-03-20 |
Family
ID=16348770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19589583A Granted JPS6089618A (ja) | 1983-10-19 | 1983-10-19 | 排ガス燃焼装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6089618A (en]) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6193310A (ja) * | 1984-10-15 | 1986-05-12 | Mitsui Toatsu Chem Inc | 廃ガスの処理方法 |
CN102705842B (zh) * | 2012-01-12 | 2014-11-05 | 无锡湖光工业炉有限公司 | 排烟净化燃烧装置 |
CN103047661A (zh) * | 2013-01-30 | 2013-04-17 | 中煤科工集团重庆研究院 | 地面火炬型燃烧处理系统 |
-
1983
- 1983-10-19 JP JP19589583A patent/JPS6089618A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6089618A (ja) | 1985-05-20 |
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